Hydrogen energy plays an important role in achieving carbon neutralization, and plasma induced hydrogen is an effective production method. One challenge is how to guarantee high efficiency operation with wide power output range of the RF inverter system used to generate the plasma. In this paper, a multi-module parallel topology of a high-frequency inverter is analyzed, in which the power combining network can maintain the soft switching characteristics of the inverter modules. A control method of "ON/OFF + phase shift" is adopted to broaden the output power range of the inverter. The equivalent impedances of different modules are analyzed in detail. A four-module 13.56 MHz high-frequency inverter prototype is built and tested. The results show that the inverter can operate at high efficiency and wide output power range with efficiency improved by at least 5% compared with the traditional parameter design method without considering the effect of paralleled modules.